- Narrow profile design
- Continuous 360° rotation
- 26mm through bore
- High resolution encoder
- Precision index mark for homing
- Direct drive brushless servo motor
The SRS-DD Series Rotary stages are compact, direct drive, precision positioning stages designed for laboratory, factory automation and semiconductor processing equipment. The brushless direct drive technology eliminates backlash and improves reliability by eliminating sliding friction throughout the stage. The bore allows convenient routing of vacuum lines or electrical signals for a wide range of applications. Encoder resolution can be configured at the factory to best meet the needs of the application.
Product Family | SRS |
Additional Options | No Additional Options |
Hub Material | Aluminum |
Diameter | 100 |
Drive Type | Direct Drive |
Encoder | Glass Disk, 10,000 Line Pairs |
Interpolation | No Interpolation |
Precision Class | Standard Precision |
Repeatability (arc-sec) | 3* |
Resolution | 10000 Sine Periods / rev |
Continuous Velocity (deg/s) | 9000 |
Axial Runout (μm) | 5 |
Continuous Torque | 1.9 |
Encoder Output | 1Vp-p Sine and Cosine, Index |
Force X (N) | 150 |
Force Y (N) | 150 |
Force Z (N) | 300 |
Height (mm) | 132 |
Length (mm) | 125.2 |
Limit Switches | No |
Accuracy (arc-sec) | 40* |
Moment X (N·m) | 10 |
Moment Y (N·m) | 10 |
Moment Z (N·m) | 1.9 |
Encoder Resolution | 10000 Sine Periods / rev |
Peak Torque (N·m) | 5.7 |
Radial Runout (m) | 5 |
Rotational Inertia (kgm) | 0.001154 |
Stage Mass (kg) | 3.06 |
Travel Range (deg) | 360 continuous |
Width (mm) | 96 |
Wobble | 10 |
* | Controls Dependent |