- Compact Low-Profile Design
- 150mm XY Travel
- High speed linear motors
- High resolution linear encoder
- Crossed roller bearings
- Extended life trackless cable
The LXY series stages are designed for a variety of applications. This compact low profile
two-axis stage is built for high duty cycles and long life and attains high velocities for factory
automation and semiconductor processing equipment. The linear motors offer extremely smooth
operation and velocity control. The LXY series offers extraordinary levels of orthogonality and
parallelism resulting in high accuracy for combined axis motion.
| Product Family | LXY |
| Precision | Standard Precision |
| Travel (mm) | 150 |
| Frame Style | No Aperture |
| Drive Type | Linear Motor |
| Motor | Ironless Linear Servo |
| Accuracy (μm) | 10 |
| Force X Peak (N) | 170 |
| Force X Continuous (N) | 50 |
| Force Z (N) | 400 |
| Height (mm) | 83 |
| Length (mm) | 407 |
| Limit Switches | Yes |
| Encoder Resolution (μm) | 0.1 |
| Repeatability (μm) | 1 |
| Linear Velocity (mm/s) | 900 |
| Moment X (N·m) | 50 |
| Moment Y (N·m) | 50 |
| Moment Z (N·m) | 25 |
| Moving Mass X (kg) | 9.3 |
| Moving Mass Y (kg) | 4.8 |
| Encoder Type | 0.1µm Linear SS Scale |
| Orthogonality (arc-sec) | 10 |
| Pitch (arc-sec) | 15 |
| Stage Mass (kg) | 15.0 |
| Width (mm) | 332 |
| Yaw (arc-sec) | 7 |
