The ELV-BS series stages are designed for a variety of applications. These reliable ball screw stages combine high speed and high accuracy and are built for high duty cycles and long life for laboratory, factory automation and semiconductor processing equipment. They are safe for upright or inverted use and can be configured with custom payload mounting holes. The wedge design and crossed roller bearings offer an extremely rigid Z stage.
Product Family | ELV |
Travel (mm) | 12.5 |
Drive Type | Ball Screw |
Motor | Brushless Servo |
Precision Class | Standard Precision |
Accuracy (μm) | 5 |
Force X (N) | 100 |
Force Y (N) | 100 |
Force Z (N) | 100 |
Height (mm) | 66 |
Length (mm) | 293 |
Limit Switches | Yes |
Encoder Resolution (μm) | 0.1 |
Repeatability (μm) | 1 |
Linear Velocity (mm/s) | 35 |
Moment X (N·m) | 5 |
Moment Y (N·m) | 5 |
Moment Z (N·m) | 5 |
Moving Mass Z (kg) | 1.7 |
Encoder Type | 0.1µm Linear SS Scale |
Pitch (arc-sec) | 10 |
Stage Mass (kg) | 6.00 |
Width (mm) | 165 |
Yaw (arc-sec) | 10 |